KR580VM80A - getting ready for reverse engineering : weekend die-shot

We decided to take a closer look at the most popular soviet processor KR580VM80A (first shoot), so that group of enthusiasts (russian only) would be able to recover schematic from it's layout.



A bit more dirt, but less overetch:


Dark field - metal is clearly visible:


Polarized light - metal and vias are visible:


After metallization etch.