OPUS Microsystems OP-6111 - MEMS 2D scanner : weekend die-shot

OPUS Microsystems OP-6111 is a sensor-less resonant 2D-tilting MEMS mirror for application requiring laser scanning (laser projectors, 3D scanning, photoresist exposure e.t.c). Electrostatic actuator.

Die size 3688x3180 µm, mirror is 1000 µm in diameter.