National Semiconductor LM330 - first LDO (1976) : weekend die-shot

LM330/LM2930 (LM130) is the first LDO linear regulator manufactured by National Semiconductor since 1976.
Die size 1723x1490 µm.



On a different die one can see funny litho/processing defect over power transistor (especially at full resolution):


Wafer also had few test chips:


That was on 3" wafer:


Thanks for the original wafers to Bob Miller, one of the designers of this chip.