January 10, 2013

1886VE10 : Weekend die-shot

1886ВЕ10 is a rad-hard 8-bit microcontroller (50Mhz), designed by Milandr and manufactured at Mikron (Zelenograd, Russia).
Technology : bulk Si, 180nm with aluminum metalization. Radiation hardening is achieved by using edgeless-transistors and 8T SRAM cells.

Die size 5000x3750 µm.

After metalization etch:

Not much to see using optical microscope:

Bright cylinders are tungsten via's left after etching metalization and ILD: